CCV series are in-line PECVD systems for the deposition of amorphous silicon films and microcrystalline silicon. The system is designed for high performance at low cost; in addition, it has a large installation base for the production of solar cells.
It is available for large substrate sizes (1100 x 1400 mm), has high performance through the processing of two substrates at once, is easy to maintain and low operating costs.
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